EXTENDED 
          X-RAY ABSORPTION FINE STRUCTURE 
        Published 
          in: 
          1) 
          A. Kodre, I. 
          Arčon, Proceedings of 36th International Conference on Microelectronics, 
          Devices and Materials, MIDEM, Postojna, Slovenia, October 28-20, 2000, 
          p. 191-196
          2) I. Arčon, M. Mozetič, A. Kodre, J. Jagielski, A. 
          Traverse, EXAFS study of NiAl in thin films, J. Sinch. Radiation 8 (2001) 
          493-495 
          
        Abstract
        
          With the availability of the synchrotron radiation sources, x-ray absorption 
          spectroscopy techniques (XAS) developed into widely used tools for the 
          structural research of materials by identifying the local structure 
          around atoms of a selected type in the sample. In EXAFS (Extended X-ray 
          Absorption Fine Structure) number and species of neighbour atoms, their 
          distance from the selected atom and the thermal or structural disorder 
          of their positions can be determined from the oscillatory part of the 
          absorption coefficient above a major absorption edge. The analysis can 
          be applied to crystalline, nanostructural or amorphous materials, liquids 
          and molecular gases. EXAFS is often the only practical way to study 
          the arrangement of atoms in materials without long range order, where 
          traditional diffraction techniques cannot be used.
        Introduction
          High resolution x-ray 
          absorption spectroscopy (XAS), that became available with the development 
          of synchrotron radiation sources, has introduced powerful experimental 
          methods for the investigation of atomic and molecular structures of 
          materials. With the synchrotron radiation high-flux monochromatic x-ray 
          beams with the energy resolution 
 
          of the order of 10^(-4) are easily obtainable, allowing measurements 
          of high quality absorption spectra in a short time. In a typical experimental 
          set-up (Fig. 1) ionisation cells monitor the intensity of incident (Io) 
          and transmitted (I1) monochromatic photon beam through the sample. With 
          the well-known exponential attenuation of x-rays in a homogeneous medium, 
          the absorption coefficient 
at 
          a given photon energy E can be obtained from the relation 
, 
          where d is the sample thickness. The energy dependence of the absorption 
          coefficient is collected by a stepwise scan of the photon energy in 
          the monochromatic beam with the Bragg monochromator. 
        
          
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            | Fig. 
              1. Schematic view of E4 x-ray beamline at Hamburger 
              Synchrotron Radiation Laboratory (HASYLAB) at DESY in Hamburg. | 
          
        
        
           
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              The dominant 
                process in the x-ray absorption at photon energies below 100 keV 
                is photoeffect, whereby the photon is completely absorbed, transferring 
                its energy to the ejected photoelectron. The x-ray absorption 
                coefficient for photoeffect decreases smoothly with increasing 
                photon energy. However, when the photon energy reaches one of 
                the deep inner-shell ionization energies of the atom, a sharp 
                jump (absorption edge) marks the opening of an additional photoabsorption 
                channel. Immediately above the absorption edge, in a range of 
                up to 1000 eV, a precise measurement of absorption shows rich 
                fine structure superposed onto the smooth energy dependence. The 
                structure is called Extended X-ray Absorption Fine Structure (EXAFS). 
                An example is shown in Fig. 2, where K-edge absorption spectrum 
                of rubidium measured on RbNO3 in water solution, is plotted. 
              EXAFS appears 
                above the absorption edges whenever the absorbing atom is closely 
                surrounded by other atoms i.e. in solid state, in liquids or in 
                molecular gasses. In case of free atoms, as for example in noble 
                gasses or monatomic vapours (Rb vapour spectrum in Fig. 2), there 
                is no EXAFS component in the absorption spectrum.  | 
          
           
            | Fig. 
              2 : X-ray absorption spectra of RbNO3 water solution 
              and rubidium vapour in the energy range of Rb K-edge. | 
          
        
         
        EXAFS arises from 
          the wavelike nature of the final photoelectron state. When an x-ray 
          photon is absorbed an inner shell electron is preferentially ejected 
          as a photoelectron with kinetic energy equal to the difference between 
          the photon energy E and the inner-shell binding energy Eo. According 
          to quantum theory this photoelectron can be visualized as an outgoing 
          spherical wave centred at the excited atom (Figure 3). The photoelectron 
          wavevector is 
 
          given by:
        
           
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            (1) | 
          
        
         This electron wave 
          is scattered by neighbor atoms, and the new waves emanating from each 
          scattering site are superposed to the initial outgoing wave. The interference 
          of the initial and scattered waves at the absorbing atom affects the 
          probability for photoeffect. With the increasing (x-ray) photon energy 
          the wavevector of the photoelectron wave increases, leading to alternating 
          constructive and destructive interference.
        
          
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            | 
 Fig. 
                3. Schematics of the EXAFS process illustrating the 
                origin of EXAFS oscillations due to the interference of outgoing 
                and backscattered photoelectron wave.  | 
          
        
         The oscillatory 
          part of the absorption coefficient is normalised by the smooth atomic 
          absorption 
          background ?o, defining the EXAFS signal:
        
           
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            (2) | 
          
        
        
          If we consider only the contribution of single scattering from the surrounding 
          atoms then the EXAFS signal can be completely described by a sum of 
          sine terms in the wavevector k. Each term represents a contribution 
          of a spherical shell of equivalent atoms at a distance Ri from the absorbing 
          atom [1]:
        
           
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            (3) | 
          
        
         with the atom-specific 
          phase shift di and the amplitude factor:
        
           
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            (4) | 
          
        
        
          where Ni is the number of atoms in the shell, Fi(k) the corresponding 
          magnitude of the photoelectron backscattering amplitude, 
 
          Debye-Waller factor, measuring the thermal and structural disorder in 
          the shell, and 
 
          is the mean free path of the photoelectron. Additional amplitude reduction 
          factor 
 
          is introduced to describe effects of multielectron excitations accompanying 
          the photoeffect in the inner shell.
          We can see that EXAFS spectrum measured above the absorption edge of 
          a selected type of atoms contains scalar information on their local 
          structure. One could say that a photoelectron emitted in the process 
          of photoeffect acts as a radar wave sensing the immediate vicinity of 
          the parent atom and the information is stored in the resulting EXAFS 
          oscillations. 
          By Fourier transformation of the measured EXAFS structure the contributions 
          of individual shells of atoms are separated visually. The peaks in FT 
          magnitude spectra appear at the corresponding positions Ri. To obtain 
          quantitative information on the local environment, i.e. number and species 
          of neighboring atoms in a given shell, their distance from the absorbing 
          atom and their thermal or structural disorder, the peak of interest 
          is analysed. An example is given in Figs. 4 and 5, where Ni K-edge EXAFS 
          spectra measured on Ni metal and several Ni/Al nanostructure coatings 
          are shown together with their Fourier transform magnitudes.
          The theoretical basis of the EXAFS method is firmly established and 
          the necessary electron scattering data known with sufficient accuracy 
          so that ab initio modeling of the structure is possible. Several computer 
          programs have been developed for the quantitative analysis, which take 
          into account single scattering (eq. 3,4) as well as multiple scattering 
          contributions to the EXAFS signal [2,3]. Structural parameters are obtained 
          by fitting of the model function to the measured EXAFS spectra in real 
          (k) or in Fourier transform (R) space. Interatomic distance can be determined 
          with very high accuracy (typical uncertainties below 1%), while for 
          the number of neighbors and the corresponding Debye-Waller factor lower 
          precision (~ 10%) is only attainable, due to correlations between the 
          two parameters.
        This structural 
          information can be extracted not only for crystalline materials, but 
          most notably also for amorphous materials, liquids and molecular gases, 
          where traditional diffraction techniques cannot be used. For materials 
          without long range order, EXAFS is often the only practical way to study 
          the arrangement of atoms.
          In the example in Figs. 4 and 5 Ni K edge EXAFS is used to study the 
          formation of technologically important coatings of nickel aluminide. 
          The coatings were prepared by ion-beam mixing of stoichiometric Ni/Al 
          multilayer structure sputter-deposited on a silicon substrate at different 
          substrate temperatures in the range from -145°C to 330°C [4]. The diffusion 
          of Ni atoms into the Al matrix during the treatment has been established 
          by Auger electron spectroscopy (AES). The method, however, cannot tell 
          whether the diffused component remains in separate nanoparticles of 
          pure metal or whether the desired NiAl alloy is formed. X-ray diffraction 
          is of little help, since for temperatures below 400°C the coatings do 
          not relax into the long range order.
        
           
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            | Fig. 
              4 & 5. Ni K-edge EXAFS spectra (left) and their 
              Fourier transform magnitudes (right) measured on the as deposited 
              Ni/Al multilayer sample and on samples after ion mixing at substrate 
              temperatures -140°C, 130°C, 230°C, 280°C and 330°C. For comparison 
              the spectra of Ni metal and NiAl monocrystal are added. Solid line 
              - experiment; dashed line - EXAFS model. The spectra were recorded 
              at the XAS13 experimental station of the DCI storage ring at LURE, 
              Orsay (France). | 
          
        
        With Ni K-edge EXAFS 
          the local structure within the sphere of about 5 A radius around Ni 
          atoms is obtained. The basic facts about the structure can be deduced 
          already from the Fourier transforms (Fig. 4), even before the detailed 
          quantitative analysis is performed. The sequence of the FT spectra for 
          increasing substrate temperatures shows that there is indeed a change 
          from the pure fcc Ni structure in the as-deposited Ni/Al multilayer, 
          to the NiAl binary alloy structure after the application of the ion 
          mixing.
          Quantitative EXAFS analysis is used to determine the ratio of the two 
          phases in each coating. EXAFS models based on crystal structures of 
          Ni metal (fcc) and NiAl binary alloy (CsCl structure) were constructed. 
          The treated Ni/Al coatings were described by a superposition of the 
          two models. The environments of Ni atoms in the two crystal structures 
          differ so much, that the analysis of the nearest neighbours up to 3 
          A is sufficient to identify the amount of each phase in the treated 
          samples.
          The presence of the nickel aluminide phase is found only for substrate 
          temperatures above 230°C. For the two lowermost temperature points, 
          the presence of the first shell of Al neighbors is established, but 
          the observed Ni-Al bonds result merely from Ni atoms knocked off into 
          the Al layer. The medium is too cold to relax with diffusion into the 
          stoichiometric NiAl alloy. At the temperature of 280°C and above the 
          treatment of the coating leads to predominant nickel aluminide phase. 
          However, about 20% of Ni is still found in the metallic fcc phase.
          
         
         
         
         
         
         
         
        
           
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